For semiconductors

You have a bright future ahead of you

For semiconductor industry

모델명   :   IR-PC-700
제품특징   :   excellent quality!




Heating MethodConvection
InternalW560 × D650 × H405
ExternalW1400 × D2060 × H1590
Process Chamber MaterialSUS304 Polishing
Temperature Control MethodProgrammable PID Control
Thermocouple TypeK-Type
Temp UniformitySet temp. ±3℃ at 60℃ (Design Temp : 230℃)
Chamber working pressure16 kgf/㎠ (Max 22 kgf/㎠)
Pressurizing methodProvided by CDA & Booster
Pressure ControlIncrease / Decrease: Valve (segments) control
HeaterSheath Pin Heater
Air circulating methodSirocco Fan + Motor
Motor Shaft SealingMagnetic Driver Seal

※ Size and other specifications are always negotiable with clients' demand.