For semiconductors

You have a bright future ahead of you

Autoclave for Semiconductors
well-used for semiconductor industry

모델명   :   PC-860LF
제품특징   :   -
   

 Specification

ModelPC-860LF
Environmental Condition Temperature 5℃ to 35℃
Maximum relative humidity 85%RH
Altitude up to 2,000m
Chamber Volume (ℓ)820L
Heater Power (KW)10.5KW
TemperatureRange45 ~ 100℃
Control0.1℃
Accuracy± 3℃ at 50℃
ControllerDigital PID control system
SensorK-type
Stability± 1℃
Heat up Time60℃ within 100min 이내 (at empty chamber)
VacuumRangeUp to 9
Degree0.1
MaterialInteriorStainless steel
ExteriorStainless steel
HeaterSUS sheath heater
Insulation-
Door packingHeat resistance silicone rubber
Inner glass-
Heating MethodSUS sheath heater (3.5KW × 3EA)
ShelfN/A
Dimension
(W×D×H,mm)
InternalØ800×1500L
External1400(W)×2320(D)×1698(H)
Power220V, 380V / 60Hz / 3~20KW
Weight(kg)About 1,500kg

※ Size and other specifications are always negotiable with clients' demand.