半导体工业用Autoclave
适用于半导体工业的优秀压热器
모델명
: PC-860LF
제품특징 : -
제품특징 : -
Specification
| Model | PC-860LF | |
|---|---|---|
| Environmental Condition | Temperature 5℃ to 35℃ Maximum relative humidity 85%RH Altitude up to 2,000m | |
| Chamber Volume (ℓ) | 820L | |
| Heater Power (KW) | 10.5KW | |
| Temperature | Range | 45 ~ 100℃ |
| Control | 0.1℃ | |
| Accuracy | ± 3℃ at 50℃ | |
| Controller | Digital PID control system | |
| Sensor | K-type | |
| Stability | ± 1℃ | |
| Heat up Time | 60℃ within 100min 이내 (at empty chamber) | |
| Vacuum | Range | Up to 9 |
| Degree | 0.1 | |
| Material | Interior | Stainless steel |
| Exterior | Stainless steel | |
| Heater | SUS sheath heater | |
| Insulation | - | |
| Door packing | Heat resistance silicone rubber | |
| Inner glass | - | |
| Heating Method | SUS sheath heater (3.5KW × 3EA) | |
| Shelf | N/A | |
| Dimension (W×D×H,mm) | Internal | Ø800×1500L |
| External | 1400(W)×2320(D)×1698(H) | |
| Power | 220V, 380V / 60Hz / 3~20KW | |
| Weight(kg) | About 1,500kg | |
[이 게시물은 최고관리자님에 의해 2023-01-09 13:32:09 반도체용 장비에서 복사 됨]