중형 Autoclave
반도체 공정용
모델명
: IR-PC-700
제품특징 : 반도체 공정용
제품특징 : 반도체 공정용
제품 사양 (Specification)
Model | IR-PC-700 | |
---|---|---|
Heating Method | Convection | |
Dimension (mm) |
Internal | W560 × D650 × H405 |
External | W1400 × D2060 × H1590 | |
Process Chamber Material | SUS304 Polishing | |
Temperature Control Method | Programmable PID Control | |
Thermocouple Type | K-Type | |
Temp Uniformity | Set temp. ±3℃ at 60℃ (Design Temp : 230℃) | |
Chamber working pressure | 16 kgf/㎠ (Max 22 kgf/㎠) | |
Pressurizing method | Provided by CDA & Booster | |
Pressure Control | Increase / Decrease: Valve (segments) control | |
Heater | Sheath Pin Heater | |
Air circulating method | Sirocco Fan + Motor | |
Motor Shaft Sealing | Magnetic Driver Seal |
Youtube Link : https://youtu.be/hJF5WPdQZM8