Autoclave for Semiconductors
well-used for semiconductor industry
모델명
: PC-860LF
제품특징 : -
제품특징 : -
Specification
Model | PC-860LF | |
---|---|---|
Environmental Condition |
Temperature 5℃ to 35℃ Maximum relative humidity 85%RH Altitude up to 2,000m | |
Chamber Volume (ℓ) | 820L | |
Heater Power (KW) | 10.5KW | |
Temperature | Range | 45 ~ 100℃ |
Control | 0.1℃ | |
Accuracy | ± 3℃ at 50℃ | |
Controller | Digital PID control system | |
Sensor | K-type | |
Stability | ± 1℃ | |
Heat up Time | 60℃ within 100min (at empty chamber) | |
Vacuum | Range | Up to 9 |
Degree | 0.1 | |
Material | Interior | Stainless steel |
Exterior | Stainless steel | |
Heater | SUS sheath heater | |
Insulation | - | |
Door packing | Heat resistance silicone rubber | |
Inner glass | - | |
Heating Method | SUS sheath heater (3.5KW × 3EA) | |
Shelf | N/A | |
Dimension (W×D×H,mm) | Internal | Ø800×1500L |
External | 1400(W)×2320(D)×1698(H) | |
Power | 220V, 380V / 60Hz / 3~20KW | |
Weight(kg) | About 1,500kg |
※ Size and other specifications are always negotiable with clients' demand.