真空设备

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真空烘箱(温度腔体)
VACUUM OVEN (TEMP CHAMBER)

모델명    :   VO-16000S
제품특징    :   在制造显示器、半导体、二次电池等所需的零件或构成要素时,去除水分或杂质。

제품 특징 (Feature)

  • PID Auto-tuning controller  

    根据周围的环境,找出正确的PID值,从而进行精确的温度控制。(Digital LED or LCD可选项)

  • 适用于High generation G8.5 TFT-LCD配件、OLED配件、半导体配件、阳极氧化膜工艺的特别配件等制造。
    (是助于制造显示器、半导体、二次电池等所需的零件或构成要素。)  
  • 主要用于去除零件中含有的水分或杂质。

  • 保证大型设备的稳定性和真空保持。

  • 可以按部分进行控制。

제품 사양 (Specification)

List

Description

Chamber Volume

16000L

Temperature

Range

60~150℃ (Max 120C)

Heat-up time

120℃ within 60 min

Controller

Digital PID Control

Vacuum

Gauge

Digital Vacuum Gauge

Reach Time

~ 5 x 10^4 torr within 20 min at empty

~ 1 x 10^4 torr within 50 min at empty

(There may be a difference from the actual result.)

Dry Pump

-Nominal/Operation Capacity: 3,517/3,000 m2/hr

-Ultimate/Operation Pressure: 0.0005/0.001Torr

-Booster : 380V 3P, 7.5kw

-Pump: 380V 3P, 18.5kw

-Booster Inverter Control / Discharger Silencer

-Noise Level : 82dB

-Chiller 10~15HP included

Material

Chamber

Stainless Steel 304

Body

Steel, 1.2t, Powder Coating

Sensor

K-Type

Insulation

Ceramic Wool

Door Gasket

Heat-Resistant Silicone (O-Ring Type)

Door Cooling

Will be operated by Chiller or more

Viewing Window

Temperature Safety Glass, 12t

Heater

100 kw

Cart

Needs to be mutually-confirmed with detailed design.

(Product Size: 3000 x 3500 x 45mm, 1Ton)

With a cart, total weight: Max 2 Ton

Size

(W x D x H) mm

Internal

4000 x 4500 x 1000

External

4600 x 5100 x 1500

(External dimension may change upon design)

Power Consumption

380V 3P, 150kW, 300A, 50/60Hz